ELT 2437 - Vacuum and Power RF Systems

3 Credit Hour(s) • 67.5 Contact Hours (Lecture/Lab Combination)
Prerequisite: ELT 1206

Covers vacuum systems and RF (radio frequency) energy sources in the manufacture of semiconductor devices. Includes gas laws and gas properties, vacuum pumps, gauges and valves, and leak detection techniques. Addresses plasma physics, RF generators, transmission lines, RF interference, and safety.